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Detector calibrations are a crucial component of the United States industry's extreme ultraviolet (EUV) calibrations needs. Both EUV source manufacturers and makers of EUV metrology and inspection tools require well-calibrated and stable detectors.
This need requires a new experimental station replacing the obsolete normal incidence monochramotor on beamline 4 (BL-4), which has been used to calibrate photodetectors in the wavelength region between 120 nm and 320 nm.
A new monochromator and end station are being designed for BL-4.
The new monochromator will combine grazing and normal incidence gratings with high quality mirrors: